SI1013-C-GM2R EZR32HG320F64R67G-B0 EFR32BG13P632F512IM48-D NRF51822-QFAB-R7 EFR32FG14P232F128GM48-B EZR32HG320F64R68G-B0 EFR32BG13P632F512IM48-DR NRF52832-CIAA-R EFR32FG14P232F128GM48-BR TC35676FSG-001(EL) TRF6903PTR NRF52832-QFAA-R EZR32LG330F256R55G-C0 TC35675XBG-001(EL) ATWILC1000A-MU-Y NRF52832-QFAA-R7 EZR32LG330F64R63G-C0 TC35662IXBG(EL) ATWILC1001A-MU-Y NRF51822-QFAC-R