EFM32TG11B540F64IM64-A C164CL6RMCAKXUMA1 UPD78F9222MC(A)-5A4-A MB89935BPFV-GS-302-ERE1 MB89053PF-G-135-JNE1 MB95F654LNWQN-G-SNERE1 R5F564MFGDFP#31 EFM32TG11B520F128IQ64-A C164CL6RMCAKXUMA2 UPD78F9222MC(A)-CAA-E2-AX MB89983PMC-G-219E1 MB89053PF-G-136-JNE1 MB95F656ENPF-G-SNE2 EFM32TG11B140F64GM64-A R5F564MFHDFB#31 EFM32TG11B540F64IQ64-A C164CL6RMCAKXUMA3 UPD78F9222MC(A2)-5A4-E2-A MB89121PMC-G-595-JNE1 MB89053PF-G-137E1